14

Measurements of Ferroelectric MEMS Microphones

Year:
2005
Language:
english
File:
PDF, 1.72 MB
english, 2005
15

Micro-Raman spectroscopy measurement of stress in silicon

Year:
2007
Language:
english
File:
PDF, 128 KB
english, 2007
16

An array CMOS magnetic-field sensor

Year:
1993
Language:
english
File:
PDF, 451 KB
english, 1993
29

A novel pressure sensor structure for integrated sensors

Year:
1990
Language:
english
File:
PDF, 404 KB
english, 1990
47

ACTIVE DAMPING OF A PIEZOELECTRIC MEMS ACOUSTIC SENSOR

Year:
2006
Language:
english
File:
PDF, 2.24 MB
english, 2006